TY  JOUR
TI  TEMPERATURE DISTRIBUTION IN PRODUCTION REACTOR POLYCRYSTALLIC SILICON
KW  polycrystalline silicon reactor
KW  temperature distribution
KW  Laplace equation
KW  grid method
KW  color table.
JO  Bulletin of the Angarsk State Technical University
AU  Senotova, S.A.
PY  2020
IS  1
PB  Federal State Funded Educational Establishment of Higher Education «Angarsk State Technical University»