00651naa#a2200169#i#4500001001500000005001700015011001400032100004100046102000700087200009100094210012500185215001000310608002700320686007700347700003500424856002200459EN\\bibl\4112620240506183859.1##a2686-777X##a20201215b2020####ek#y0engy0150####ca##aRU1#aTEMPERATURE DISTRIBUTION IN PRODUCTION REACTOR POLYCRYSTALLIC SILICONeJournal article1#aAngarskcFederal State Funded Educational Establishment of Higher Education «Angarsk State Technical University»d2020##a3 с.##aJournal article2local##aТехническая кибернетика. Бионика. 52042tbk#1aSenotovagSvetlana Anatol'evna4#aangtu.editorum.ru