00651naa#a2200169#i#450# EN\\bibl\41126 20240506222933.1 2686-777X 20201215b2020####ek#y0engy0150####ca RU TEMPERATURE DISTRIBUTION IN PRODUCTION REACTOR POLYCRYSTALLIC SILICON Journal article Angarsk Federal State Funded Educational Establishment of Higher Education «Angarsk State Technical University» 2020 3 с. Journal article local Техническая кибернетика. Бионика. 5204 tbk Senotova Svetlana Anatol'evna angtu.editorum.ru