00650naa#a2200169#i#4500001001500000005001700015011001400032100004100046102000700087200009600094210012500190215001000315608002700325675007100352700003500423856002200458EN\\bibl\8209120240519093335.7##a2686-9896##a20240422b2024####ek#y0engy0150####ca##aRU1#aASYMPTOTIC TEMPERATURE STABILITY DURING POLYCRYSTALLINE SILICON PRODUCTIONeJournal article1#aAngarskcFederal State Funded Educational Establishment of Higher Education «Angarsk State Technical University»d2024##a1 с.##aJournal article2local##aМеханические колебания. Акустика. 534#1aSenotovagSvetlana Anatol'evna4#aangtu.editorum.ru